Nanometer scale surface roughness measurement based on afm 基于原子力顯微鏡的納米級表面粗糙度測量
Calibration specification for contact stylus instruments of surface roughness measurement by the profile method 觸針式表面粗糙度測量儀校準(zhǔn)規(guī)范
The method uses frequency components of the marks and the corresponding amplitudes as the indexes for the quantitative evaluation , which can be obtained directly from the surface roughness measurement system 此法以振紋之頻率成分及其振幅為量化之指針,其值可直接由三維表面粗度量測系統(tǒng)求得。
In this paper , non - contact surface roughness measurement methods and their current research status are synthetically reviewed , and advance direction of the research is prospected to promote the research in theory and application in the future 摘要文中綜述了各類非接觸式測量方法及其研究現(xiàn)狀,并對其未來的研究發(fā)展方向進行了展望,以進一步推動理論和應(yīng)用研究的工作。